Bosseboeuf, A: search on Z-Library

The world's largest scientific articles store. 70,000,000+ articles for free.

Don't use scam websites

1

Silicon full wafer bonding with atomic layer deposited titanium dioxide and aluminum oxide intermediate films

R.L. Puurunen, T. Suni, O.M.E. Ylivaara, H. Kondo, M. Ammar, T. Ishida, H. Fujita, A. Bosseboeuf, S. Zaima, H. Kattelus

Journal:

Sensors and Actuators A: Physical

Year:

2012

Language:

english

File:

PDF, 1.74 MB

english, 2012

2

Gold metallizations for eutectic bonding of silicon wafers

S. Lani, A. Bosseboeuf, B. Belier, C. Clerc, C. Gousset, J. Aubert

Journal:

Microsystem Technologies

Year:

2006

Language:

english

File:

PDF, 408 KB

english, 2006

3

MEMS packaging process by film transfer using an anti-adhesive layer

Sebastien Brault, O. Garel, G. Schelcher, N. Isac, F. Parrain, A. Bosseboeuf, F. Verjus, M. Desgeorges, E. Dufour-Gergam

Journal:

Microsystem Technologies

Year:

2010

Language:

english

File:

PDF, 499 KB

english, 2010

4

[IEEE 2016 Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS (DTIP) - Budapest, Hungary (2016.5.30-2016.6.2)] 2016 Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS (DTIP) - Evaporated Zr-V, Zr-Ti and Zr-Co getter thin films: Activation temperature and microstructure

Ming Wu,, Lemettre, Sylvain, Mansour, Djamel, Plante, Marie-Paule, Bosseboeuf, Alain, Seok, Seonho, Moulin, Johan

Year:

2016

Language:

english

File:

PDF, 1.80 MB

english, 2016

5

Oblique angle deposition of Au/Ti porous getter films

Wu, Ming, Moulin, Johan, Bosseboeuf, Alain

Journal:

Journal of Applied Physics

Year:

2018

Language:

english

File:

PDF, 2.29 MB

english, 2018

6

[Microtechnology and MEMS] Engineering of Micro/Nano Biosystems (Fundamentals & Applications) ||

Barbillon, Gregory, Bosseboeuf, Alain, Chun, Kukjin, Ferrigno, Rosaria, Français, Olivier

Year:

2020

Language:

english

File:

PDF, 15.98 MB

english, 2020

7

Cross-country comparison on energy efficiency indicators: the on-going European effort towards a common methodology

Didier Bosseboeuf, Bertrand Chateau, Bruno Lapillonne

Journal:

Year:

1997

Language:

english

File:

PDF, 1003 KB

english, 1997

8

Experimental measurements and behavioral modeling of an electrostatically actuated bi-axial micromirror

Fabien Parrain, Souhil Megherbi, Gilles Raynaud, Hervé Mathias, Jean-Paul Gilles, Alain Bosseboeuf, Gerold Schröpfer, Nicolas Faure, Pierre Cusin

Journal:

Microsystem Technologies

Year:

2005

Language:

english

File:

PDF, 585 KB

english, 2005

9

GaAs-based tuning fork microresonators: A first step towards a GaAs-based coriolis 3-axis Micro-Vibrating Rate Gyro (GaAs 3-axis μCVG)

I. Roland, S. Masson, O. Ducloux, O. Le Traon, A. Bosseboeuf

Journal:

Sensors and Actuators A: Physical

Year:

2011

Language:

english

File:

PDF, 1.03 MB

english, 2011

10

Comparative study of Au/Ti, Au/V and Au/Zr films oxygen gettering ability

Wu, M., Moulin, J., Coste, P., Perrot, S., Perrossier, J.-L., Renard, C., Bosseboeuf, A.

Journal:

Thin Solid Films

Year:

2016

Language:

english

File:

PDF, 997 KB

english, 2016

11

[IEEE 2017 Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS (DTIP) - Bordeaux, France (2017.5.29-2017.6.1)] 2017 Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS (DTIP) - In-situ electrical characterization of co-evaporated Zr-V, Zr-Ti and Zr-Co thin getter films during thermal activation

Lemettre, Sylvain, Hammami, Sana, Bosseboeuf, Alain, Coste, Philippe, Moulin, Johan

Year:

2017

Language:

english

File:

PDF, 341 KB

english, 2017

12

[Microtechnology and MEMS] Engineering of Micro/Nano Biosystems (Fundamentals & Applications) || Micro/Nano Fabrication and Packaging Technologies for Bio Systems

Barbillon, Gregory, Bosseboeuf, Alain, Chun, Kukjin, Ferrigno, Rosaria, Français, Olivier

Year:

2020

Language:

english

File:

PDF, 3.05 MB

english, 2020

13

[Microtechnology and MEMS] Engineering of Micro/Nano Biosystems (Fundamentals & Applications) || Magnetophoresis in Bio-Devices

Barbillon, Gregory, Bosseboeuf, Alain, Chun, Kukjin, Ferrigno, Rosaria, Français, Olivier

Year:

2020

Language:

english

File:

PDF, 1.81 MB

english, 2020

14

In situ Auger electron spectroscopy investigation of the chemical bonding of ion-beam-deposited silicon nitride

D. Bouchier, A. Bosseboeuf

Journal:

Thin Solid Films

Year:

1986

Language:

english

File:

PDF, 917 KB

english, 1986

15

Micro Pirani vacuum gauges manufactured by a film transfer process

G. Schelcher, E. Lefeuvre, S. Brault, F. Parrain, E. Martincic, E. Dufour-Gergam, A. Bosseboeuf

Journal:

Procedia Engineering

Year:

2010

File:

PDF, 6.12 MB

2010

16

PZT polarization voltage effects on off-centered PZT patch actuating silicon membrane

M. Guirardel, C. Bergaud, E. Cattan, D. Remiens, B. Belier, S. Petitgrand, A. Bosseboeuf

Journal:

Sensors and Actuators A: Physical

Year:

2004

Language:

english

File:

PDF, 264 KB

english, 2004

17

Effect of the residual stress on the determination through nanoindentation technique of the Young's modulus of W thin film deposit on SiO2/Si substrate

M. Qasmi, P. Delobelle, F. Richard, A. Bosseboeuf

Journal:

Surface and Coatings Technology

Year:

2006

Language:

english

File:

PDF, 389 KB

english, 2006

18

3D measurement of micromechanical devices vibration mode shapes with a stroboscopic interferometric microscope

S. Petitgrand, R. Yahiaoui, K. Danaie, A. Bosseboeuf, J.P. Gilles

Journal:

Optics and Lasers in Engineering

Year:

2001

Language:

english

File:

PDF, 562 KB

english, 2001

19

Electromagnetic micro-device realized by electrochemical way

Anne-Lise Coutrot, Elisabeth Dufour-Gergam, Emile Martincic, Jean-Paul Gilles, Jean-Paul Grandchamp, Jean-Marie Quemper, Alain Bosseboeuf, Francisco Alves, Baroini Ahamada

Journal:

Sensors and Actuators A: Physical

Year:

2001

Language:

english

File:

PDF, 282 KB

english, 2001

20

Shape memory thin films with transition above room temperature from Ni-rich NiTi films

N. Frantz, E. Dufour-Gergam, J.P. Grandchamp, A. Bosseboeuf, W. Seiler, G. Nouet, G. Catillon

Journal:

Sensors and Actuators A: Physical

Year:

2002

Language:

english

File:

PDF, 245 KB

english, 2002

21

Fabrication of UV-transparent SixOyNz membranes with a low frequency PECVD reactor

K. Danaie, A. Bosseboeuf, C. Clerc, C. Gousset, G. Julie

Journal:

Sensors and Actuators A: Physical

Year:

2002

Language:

english

File:

PDF, 131 KB

english, 2002

22

Permalloy electroplating through photoresist molds

Jean-Marie Quemper, S. Nicolas, J.P. Gilles, J.P. Grandchamp, A. Bosseboeuf, T. Bourouina, E. Dufour-Gergam

Journal:

Sensors and Actuators A: Physical

Year:

1999

Language:

english

File:

PDF, 1.84 MB

english, 1999

23

Vacuum measurement in wafer level encapsulations by interference microscopy

A. Bosseboeuf, J. P. Grandchamp, C. Breluzeau, S. Lani, J. Palomo, D. Bouville

Journal:

Microsystem Technologies

Year:

2006

Language:

english

File:

PDF, 366 KB

english, 2006

24

High current densities in copper microcoils: influence of substrate on failure mode

Johan Moulin, Marion Woytasik, Jean-Paul Grandchamp, Elisabeth Dufour-Gergam, Alain Bosseboeuf

Journal:

Microsystem Technologies

Year:

2007

Language:

english

File:

PDF, 390 KB

english, 2007

25

Scanning electron microscopy for vacuum quality factor measurement of small-size MEMS resonators

J.P. Gilles, S. Megherbi, G. Raynaud, F. Parrain, H. Mathias, X. Leroux, A. Bosseboeuf

Journal:

Sensors and Actuators A: Physical

Year:

2008

Language:

english

File:

PDF, 1.22 MB

english, 2008

26

Fabrication and characterization of electrostatically driven silicon microbeams

P. Attia, M. Boutry, A. Bosseboeuf, P. Hesto

Journal:

Microelectronics Journal

Year:

1998

Language:

english

File:

PDF, 408 KB

english, 1998

27

Growth and characterization of shape memory alloy thin films for Si microactuator technologies

N. Yaakoubi, C. Serre, S. Martínez, A. Pérez-Rodríguez, J. R. Morante, J. Esteve, J. Montserrat, E. Dufour-Gergam, J. P. Granchamp, A. Bosseboeuf, N. Frantz-Rodriguez

Journal:

Journal of Materials Science: Materials in Electronics

Year:

2001

Language:

english

File:

PDF, 386 KB

english, 2001

28

SPIE Proceedings [SPIE Optical Metrology - Munich, Germany (Monday 23 June 2003)] Microsystems Engineering: Metrology and Inspection III - Simultaneous mapping of phase and amplitude of MEMS vibrations by microscopic interferometry with stroboscopic illumination

Petitgrand, Sylvain, Bosseboeuf, Alain, Gorecki, Christophe

Year:

2003

Language:

english

File:

PDF, 943 KB

english, 2003

29

Piezoelectric micromachined ultrasonic transducers based on PZT thin films

Muralt, P., Ledermann, N., Paborowski, J., Barzegar, A., Gentil, S., Belgacem, B., Petitgrand, S., Bosseboeuf, A., Setter, N.

Journal:

IEEE Transactions on Ultrasonics Ferroelectrics and Frequency Control

Year:

2005

Language:

english

File:

PDF, 1.78 MB

english, 2005

30

Large-Range MEMS Motion Detection With Subangström Noise Level Using an Integrated Piezoresistive Silicon Nanowire

Allain, Pierre Etienne, Parrain, Fabien, Bosseboeuf, Alain, Maaroufi, Seifeddine, Coste, Philippe, Walther, Arnaud

Journal:

Journal of Microelectromechanical Systems

Year:

2013

Language:

english

File:

PDF, 1.48 MB

english, 2013

31

[IEEE 2013 IEEE 26th International Conference on Micro Electro Mechanical Systems (MEMS) - Taipei, Taiwan (2013.01.20-2013.01.24)] 2013 IEEE 26th International Conference on Micro Electro Mechanical Systems (MEMS) - Micromachined piezoelectric spirals and ultra-compliant packaging for blood pressure energy harvesters powering medical implants

Deterre, M., Lefeuvre, E., Zhu, Y., Woytasik, M., Bosseboeuf, A., Boutaud, B., Dal Molin, R.

Year:

2013

Language:

english

File:

PDF, 739 KB

english, 2013

32

[IEEE 2010 7th IEEE International Conference on Group IV Photonics (GFP) - Beijing, China (2010.09.1-2010.09.3)] 7th IEEE International Conference on Group IV Photonics - Mechanical tensile strain engineering of Ge for gain achievement

Kurdi, M. El, de Kersauson, M., de Marcillac, W. Daney, Bertin, H., Martincic, E., Bosseboeuf, A., Beaudoin, G., Jakomin, R., Sagnes, I., Sauvage, S., Fishman, G., Boucaud, P.

Year:

2010

Language:

english

File:

PDF, 426 KB

english, 2010

33

[IEEE Thermal and Mechanical Simulation and Experiments in Microelectronics and Microsystems - EuroSimE 2004 - Brussels, Belgium (10-12 May 2004)] 5th International Conference on Thermal and Mechanical Simulation and Experiments in Microelectronics and Microsystems, 2004. EuroSimE 2004. Proceedings of the - Cantilever microbeams : modelling of the dynamical behaviour and material characterization

Yahiaoui, R., Bosseboeuf, A.

Year:

2004

Language:

english

File:

PDF, 859 KB

english, 2004

34

[IEEE 2012 3rd IEEE International Workshop on Low Temperature Bonding for 3D Integration (LTB-3D) - Tokyo, Japan (2012.05.22-2012.05.23)] 2012 3rd IEEE International Workshop on Low Temperature Bonding for 3D Integration - A versatile optical system for metrology and defects inspection of 3D integration processes

Perrot, S., Randle, Y., Fresquet, G., Le Bellego, D., Petitgrand, S., Coste, P., Bosseboeuf, A.

Year:

2012

Language:

english

File:

PDF, 653 KB

english, 2012

35

[IEEE 2014 4th IEEE International Workshop on Low Temperature Bonding for 3D Integration (LTB-3D) - Tokyo, Japan (2014.7.15-2014.7.16)] 2014 4th IEEE International Workshop on Low Temperature Bonding for 3D Integration (LTB-3D) - Thermal activation of Au/Ti by interdiffusion for getter film integration in wafer-level vacuum packaging

Wu, M., Moulin, J., Lani, S., Hallais, G., Renard, C., Bosseboeuf, A.

Year:

2014

Language:

english

File:

PDF, 273 KB

english, 2014

36

Low temperature activation of Au/Ti getter film for application to wafer-level vacuum packaging

Wu, Ming, Moulin, Johan, Lani, Sébastien, Hallais, Géraldine, Renard, Charles, Bosseboeuf, Alain

Journal:

Japanese Journal of Applied Physics

Year:

2015

Language:

english

File:

PDF, 1.21 MB

english, 2015

37

Effects of direct and pulse current on copper electrodeposition through photoresist molds

J. Quemper, E. Dufour-gergam, N. Frantz-rodriguez, J. Gilles, J. Grandchamp, A. Bosseboeuf

Year:

2000

Language:

english

File:

PDF, 227 KB

english, 2000

38

[ECS 214th ECS Meeting - Honolulu, HI (October 12 - October 17, 2008)] ECS Transactions - Multilayer Au-Si Eutectic Wafer Bonding with Microstructured Sealing Rings

Lani, Sebastien, Bosseboeuf, Alain, Garel, Olivier, Parrain, Fabien, Isac, Nathalie, Bouville, David, Le Roux, Xavier

Year:

2008

Language:

english

File:

PDF, 320 KB

english, 2008

39

SPIE Proceedings [SPIE Lasers in Metrology and Art Conservation - Munich, Germany (Monday 18 June 2001)] Microsystems Engineering: Metrology and Inspection - Three-dimensional full-field dynamical characterization of micromechanical devices by stroboscopic white light scanning interferometry

Bosseboeuf, Alain, Nerin, Philippe, Vabre, Pascal, Petitgrand, Sylvain, Yahiaoui, Reda, Gorecki, Christophe, Jueptner, Werner P. O., Kujawinska, Malgorzata

Year:

2001

Language:

english

File:

PDF, 337 KB

english, 2001

40

[IEEE 2017 5th International Workshop on Low Temperature Bonding for 3D Integration (LTB-3D) - Tokyo, Japan (2017.5.16-2017.5.18)] 2017 5th International Workshop on Low Temperature Bonding for 3D Integration (LTB-3D) - Wafer bonding defects inspection by IR microphotoelasticity in reflection mode

Bosseboeuf, A., Rizzi, J., Coste, P., Bessouet, C.

Year:

2017

Language:

english

File:

PDF, 636 KB

english, 2017

41

Multilayer Thin Film Getter for Sustainable Vacuum in MEMS Packaging

Wu, Ming, Moulin, Johan, Bosseboeuf, Alain

Journal:

ECS Transactions

Year:

2018

Language:

english

File:

PDF, 874 KB

english, 2018

42

Multilayer Thin Film Getter for Sustainable Vacuum in MEMS Packaging

Wu, M., Moulin, J., Bosseboeuf, A.

Journal:

ECS Journal of Solid State Science and Technology

Year:

2018

Language:

english

File:

PDF, 760 KB

english, 2018

43

[Microtechnology and MEMS] Engineering of Micro/Nano Biosystems (Fundamentals & Applications) || Electricity for Fluidics and Bio-Devices

Barbillon, Gregory, Bosseboeuf, Alain, Chun, Kukjin, Ferrigno, Rosaria, Français, Olivier

Year:

2020

Language:

english

File:

PDF, 2.31 MB

english, 2020

44

[Microtechnology and MEMS] Engineering of Micro/Nano Biosystems (Fundamentals & Applications) || Mechanics for Fluidics and Bio-Devices

Barbillon, Gregory, Bosseboeuf, Alain, Chun, Kukjin, Ferrigno, Rosaria, Français, Olivier

Year:

2020

Language:

english

File:

PDF, 2.12 MB

english, 2020

45

[Microtechnology and MEMS] Engineering of Micro/Nano Biosystems (Fundamentals & Applications) || Optics and Fluidics

Barbillon, Gregory, Bosseboeuf, Alain, Chun, Kukjin, Ferrigno, Rosaria, Français, Olivier

Year:

2020

Language:

english

File:

PDF, 3.25 MB

english, 2020

46

Analysis of the Targets and Glycosylation of Monoclonal IgAs From MGUS and Myeloma Patients

Bosseboeuf, Adrien, Seillier, CÃ©lia, Mennesson, Nicolas, Allain-Maillet, Sophie, Fourny, Maeva, Tallet, Anne, Piver, Eric, Lehours, Philippe, MÃ©graud, Francis, Berthelot, Laureline, Harb, Jean, Bigo

Journal:

Frontiers in Immunology

Year:

2020

File:

PDF, 971 KB

2020

47

Signalling, Metabolic Pathways and Iron Homeostasis in Endothelial Cells in Health, Atherosclerosis and Alzheimerâs Disease

Bosseboeuf, Emy, Raimondi, Claudio

Journal:

Year:

2020

File:

PDF, 2.48 MB

2020

48

Investigation of an Mo/SiO2 interface by electron-induced x-ray emission spectroscopy

Jonnard, P., Bonnelle, C., Bosseboeuf, A., Danaie, K., Beauprez, E.

Journal:

Surface and Interface Analysis

Year:

2000

Language:

english

File:

PDF, 89 KB

english, 2000

49

Semi-quantitative in SITU Auger analysis of silicon nitride layers deposited by reactive ion beam sputtering

A. Bosseboeuf, D. Bouchier

Journal:

Surface Science Letters

Year:

1985

Language:

english

File:

PDF, 47 KB

english, 1985

50

WNx films prepared by reactive ion-beam sputter deposition

A. Bosseboeuf, A. Fourrier, F. Meyer, A. Benhocine, G. Gautherin

Journal:

Applied Surface Science

Year:

1991

Language:

english

File:

PDF, 449 KB

english, 1991

To build up a library is to create a life. It’s never just a random collection of books.

— Carlos María Domínguez

Official channel

Z-Library Desktop Launcher

Z-Library Since 2009 support@z-lib.do

EnglishРусскийEspañolItalianoελληνικάاللغة العربيةBahasa IndonesiaBahasa Malaysiaहिन्दीDeutschFrançaisPortuguêsУкраїнськаPolski中文繁體中文日本語Tiếng ViệtAzərbaycan DiliՀայոց լեզուภาษาไทยTürk Diliქართველიবাংলাپښتوతెలుగుاردو한국어SrpskiБългарски